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蓝宝石偏角度单晶衬底(2~6英寸) | |||
材料成分 |
>99.99%,High Purity, Mono-crystalline Al2O3 (KY) |
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晶向类型C-M |
C-axis (0001) off-cut 0.5°~10° ± 0.1° toward M (1-100) |
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晶向类型C-A |
C-axis (0001) off-cut 0.5°~8° ± 0.1° toward A (11-20) |
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晶向类型A-M |
A-axis (11-20) off-cut 0.5°~6° ± 0.1° toward M (1-100) |
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晶向类型A-C |
A-axis (11-20) off-cut 0.5°~6° ± 0.1° toward C (0001) |
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晶向类型R-M |
R-axis (1-102) off-cut 0.5°~6° ± 0.1° toward M (1-100) |
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晶向类型R-C |
R-axis (1-102) off-cut 0.5°~6° ± 0.1° toward C (0001) |
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晶向类型M-C |
M-axis (1-100) off-cut 0.5°~6° ± 0.1° toward C (0001) |
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直径 |
50.8mm |
100mm |
150mm |
厚度 |
430um |
650um |
1000um |
定位边晶向 |
A-plane ± 0.3° |
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定位边长度 |
16mm |
30mm |
47.5mm |
正面状态 |
Epi-polished,Ra<0.3nm |
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反面状态 |
SSP:Fine-ground,Ra=0.8-1.2um; DSP:Epi-polished,Ra<0.3nm |
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总厚度偏差TTV |
<10 um |
<20 um |
<25 um |
弯曲度BOW |
-15~0 um |
-25~0 um |
-35~0 um |
翘曲度WARP |
<15 um |
<30 um |
<40 um |
边缘去除 |
≤2 mm |
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蓝宝石单晶 Sapphire | |
晶体结构 |
六方晶体 |
禁带宽度(eV) |
/ |
熔点(℃) |
2040℃ |
莫氏硬度(mohs) |
9 |
热导率(W·cm-1·℃-1) |
0.46W·cm-1·℃-1 |
热膨胀系数(℃-1) |
6.7*10-6 // C-axis |
晶格常数(nm) |
a=4.76Å c=12.99Å |
折射率 |
1.762~1.777 |
透过率 |
测试样品:蓝宝石:直径76.2毫米×厚度4毫米 |